Surface Analysis Equipments

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TOF-SIMS

PRODUCT

TOF SIMS-5

TOF SIMS for Surface Analsysi, Depth Profile, sims image (2D & 3D) & 3D analysis

detection of all elements
isotope sensitive
chemical information via molecules, fragments, clusters
surface and depth analysis
high lateral and depth resolution : < 70nm
low detection limit : ppm-ppb
Extended Dynamic Range (EDR)
Ar Cluser source for Organic Depth Profile

Application


TOF SIMS 는 특히 나노분석, 미량분석, 무기물 및 유기물, 부도체 분석등에서 탁월하여,


Bio-material, polymer, glass, 반도체, metal, ceramic, 이차 전지 등 의 다양한 분야의 시료를 다루고 있다.